Innovation in microelectronics: Focus on environmentally friendly technologies!

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The TU Ilmenau researches environmentally friendly microelectronics, focusing on chemical-free processes and innovative technologies.

Die TU Ilmenau forscht an umweltfreundlicher Mikroelektronik, fokussiert auf chemiefreie Verfahren und innovative Technologien.
The TU Ilmenau researches environmentally friendly microelectronics, focusing on chemical-free processes and innovative technologies.

Innovation in microelectronics: Focus on environmentally friendly technologies!

Current developments in microelectronics are characterized by innovative approaches that integrate both technical advances and more environmentally friendly manufacturing processes. An example of such a pioneering role is the research initiative at the Technical University of Ilmenau, which is led by Dr. Ulrike Brokmann and Dr. Christoph Weigel is standing. The aim of this initiative is to reduce environmentally harmful chemicals in microelectronics, especially fluorine-containing and climate-damaging process technologies. This opens up new avenues for the development of reactive ion etching processes, which are crucial for microchip production ( uni-heute.de ).

The focus of this research work is the effective handling of harmful emissions and the use of alternative materials, such as glass, which have so far been little used in microelectronics. The focus is on the precise processing of silicate glasses and glass ceramics, which aims to avoid harmful process gases. These efforts are not only in the context of microelectronics, but also have far-reaching implications for the sustainability of digital technologies in general. Digital innovations can save up to 34% of greenhouse gas emissions by 2030 ( elektronikforschung.de ).

Challenges in chip production

Researchers and engineers face significant challenges in the production process of microchips. A particularly risky step is etching through the wafer; Structures must be cut free so that sensors function correctly. This requires the structures to be able to oscillate, which presents technical difficulties. The use of aggressive etching methods such as the SF6 Bosch etching process is often complemented by the gentle technology of the XeF2 etching process. The latter has the advantage of being able to process sensitive structures without significant energy input ( tu-ilmenau.de ).

Preliminary tests at the Center for Micro- and Nanotechnologies led to a process transfer to Hahn-Schickard in the Black Forest. The final step in completing the microchip took place in Scotland at the system manufacturer memsstar. Ultimately, the customer Endress+Hauser benefited from a new development that was classified as a high-risk project. Testing the newly developed sensors took around three years, with the chances of success depending on a few seconds. These sensors meet the client's specific requirements and therefore represent a unique development, as comparable magnetometers do not exist.

Sustainability in microelectronics

The urgency of sustainable solutions in microelectronics is not only recognized by the researchers in Ilmenau, but also from a broader perspective. Information and communications technology was responsible for 3.7% of global greenhouse gas emissions in 2019. At the same time, a study shows that energy consumption in this sector increased by 9% per year between 2015 and 2020. Innovative approaches to improving communication technology and power electronics are therefore crucial in order to reduce energy requirements and ensure the sustainability of the systems ( elektronikforschung.de ).

Initiatives such as the GreenICT@FMD competence center in Germany promote the transfer of research results to environmentally friendly ICT systems. In this context, the development of resource-saving data processing methods is also emphasized as central to the future of information and communication technologies. Finally, the connection between research and business is identified as the key to innovative, sustainable solutions.

All of this underlines the important role of countries like Germany and the initiatives in Europe in the context of technological sovereignty within the Green ICT. It remains to be seen what solutions the advanced research at TU Ilmenau in microelectronics will produce in the long term. Nevertheless, it is already clear that a focus on sustainability is not only beneficial for the environment, but also has the potential to transform the industry as a whole.