Revolutionary ultrasound technology: Chemnitz researchers are setting new standards!

Revolutionary ultrasound technology: Chemnitz researchers are setting new standards!

Scientists at the Center for Micro- and Nanotechnologies (ZfM) at Chemnitz University of Technology are working on a groundbreaking technology platform for piezoelectric micromechanical ultrasonic transducers, better known as PMUTs. In close collaboration with the Fraunhofer Institute for Electronic Nanosystems ENAS, they have developed an innovative solution that aims to significantly expand the application areas of ultrasound technologies. PMUTs are particularly versatile and are suitable for non-invasive ultrasound imaging, optoacoustics in medical technology and material analysis in lightweight construction.

These state-of-the-art converters are manufactured using specialized micro and nanotechnologies. Particularly noteworthy is the structuring of silicon micromembranes, which are provided with piezoelectric thin layers made of aluminum nitride and aluminum scandium nitride. This technology promotes sustainable and resource-efficient production, which is increasingly important today.

Technical advantages and areas of application

PMUTs are characterized by their small dimensions and high integration capability, making them superior to conventional bulk converters. They also only require low electrical voltages for excitation, which makes them versatile in their application. The acoustic signals that PMUTs emit enable precise mapping of the environment, which is particularly important in the areas of medical technology and endoscopic in-vivo applications as well as in ultrasonic radar systems. The low power consumption and the ability to integrate them into existing MICROS process lines make PMUTs an attractive technology for small and medium-sized businesses.

A key feature of PMUTs is how they work: electrical voltage shapes the structures of the transducer, creating an oscillation that in turn emits an acoustic signal. This signal is reflected by the structure under investigation and returned to the PMUT, where it creates another oscillation, thus generating a sensor signal.

Innovation and research

A significant advance in research was achieved when a patent for adaptive manufacturing of PMUTs (DE 10 2023 111 777 A1) was published in 2024. This patent enables cost-effective adjustments that particularly benefit small and medium-sized companies. The quality and impact of the research is demonstrated by the fact that the results were published in a renowned study in the Nature journal, which means that both the ZfM and Fraunhofer ENAS are listed on the “PMUT Global Hotspots” world map.

Dr. Chris Stöckel, the ZfM's research field manager, devoted intensive attention to PMUT technology in his habilitation thesis, which he defended on February 4, 2025. These new microsystems will be actively integrated into everyday teaching and research to support the qualification of specialists for the technologies of the future. The opportunities that PMUTs offer not only represent technological progress, but also a significant promotion of interdisciplinary training.

In summary, it can be said that the developments in the field of piezoelectric ultrasonic transducers by Chemnitz University of Technology and the Fraunhofer Institute for Electronic Nanosystems ENAS have the potential to enable significant advances in a wide variety of applications. A variety of industries could benefit significantly from this groundbreaking technology.

For further information please visit the website of Chemnitz University of Technology and Fraunhofer ENAS.